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Compound routing SiN waveguide
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lukasc-ubc committed Nov 17, 2023
1 parent 73d81b7 commit 3c6ff07
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37 changes: 37 additions & 0 deletions klayout/EBeam/WAVEGUIDES_SiN.xml
Original file line number Diff line number Diff line change
Expand Up @@ -172,4 +172,41 @@
</component>
</waveguide>

<waveguide>
<name>Multimode SiN Strip TE 1550 nm, w=3000 nm</name>
<CML>None</CML>
<model>None</model>
<sbends>true</sbends>
<radius>300</radius>
<width>3.0</width>
<component>
<layer>SiN</layer>
<width>3.0</width>
<offset>0.0</offset>
</component>
<component>
<layer>Waveguide</layer>
<width>3.0</width>
<offset>0.0</offset>
</component>
<component>
<layer>DevRec</layer>
<width>4.0</width>
<offset>0.0</offset>
</component>
</waveguide>


<waveguide>
<name>SiN routing TE 1550 nm (compound waveguide)</name>
<compound_waveguide>
<singlemode>SiN Strip TE 1550 nm, w=750 nm</singlemode>
<multimode>Multimode SiN Strip TE 1550 nm, w=3000 nm</multimode>
<taper_library>EBeam-SiN</taper_library>
<taper_cell>taper_SiN_750_3000</taper_cell>
<taper_pin_sm>opt1</taper_pin_sm>
<taper_pin_mm>opt2</taper_pin_mm>
</compound_waveguide>
</waveguide>

</waveguides>
Binary file added klayout/EBeam/gds/EBeam_SiN/taper_SiN_750_3000.gds
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