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Split Si and SiN Waveguides
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lukasc-ubc committed Nov 17, 2023
1 parent 8b1a406 commit 73d81b7
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Showing 2 changed files with 175 additions and 74 deletions.
74 changes: 0 additions & 74 deletions klayout/EBeam/WAVEGUIDES.xml
Original file line number Diff line number Diff line change
Expand Up @@ -316,79 +316,5 @@
</compound_waveguide>
</waveguide>

<waveguide>
<name>SiN Strip TE 895 nm, w=450 nm</name>
<CML>EBeam</CML>
<sbends>true</sbends>
<model>ebeam_wg_integral_895</model>
<bezier>0.25</bezier>
<radius>25.0</radius>
<width>0.45</width>
<component>
<layer>SiN</layer>
<width>0.45</width>
<offset>0.0</offset>
</component>
<component>
<layer>Waveguide</layer>
<width>0.45</width>
<offset>0.0</offset>
</component>
<component>
<layer>DevRec</layer>
<width>1.45</width>
<offset>0.0</offset>
</component>
</waveguide>

<waveguide>
<name>SiN Strip TE 1550 nm, w=750 nm</name>
<CML>None</CML>
<model>None</model>
<sbends>true</sbends>
<bezier>0.3</bezier>
<radius>50.0</radius>
<width>0.75</width>
<component>
<layer>SiN</layer>
<width>0.75</width>
<offset>0.0</offset>
</component>
<component>
<layer>Waveguide</layer>
<width>0.75</width>
<offset>0.0</offset>
</component>
<component>
<layer>DevRec</layer>
<width>1.95</width>
<offset>0.0</offset>
</component>
</waveguide>

<waveguide>
<name>SiN Strip TE 1550 nm, w=800 nm</name>
<CML>None</CML>
<model>None</model>
<sbends>true</sbends>
<bezier>0.3</bezier>
<radius>50.0</radius>
<width>0.8</width>
<component>
<layer>SiN</layer>
<width>0.8</width>
<offset>0.0</offset>
</component>
<component>
<layer>Waveguide</layer>
<width>0.8</width>
<offset>0.0</offset>
</component>
<component>
<layer>DevRec</layer>
<width>1.95</width>
<offset>0.0</offset>
</component>
</waveguide>

</waveguides>
175 changes: 175 additions & 0 deletions klayout/EBeam/WAVEGUIDES_SiN.xml
Original file line number Diff line number Diff line change
@@ -0,0 +1,175 @@
<?xml version="1.0" encoding="utf-8"?>
<waveguides>

<waveguide>
<name>SiN Strip TE 895 nm, w=450 nm</name>
<CML>EBeam</CML>
<sbends>true</sbends>
<model>ebeam_wg_integral_895</model>
<bezier>0.25</bezier>
<radius>25.0</radius>
<width>0.45</width>
<component>
<layer>SiN</layer>
<width>0.45</width>
<offset>0.0</offset>
</component>
<component>
<layer>Waveguide</layer>
<width>0.45</width>
<offset>0.0</offset>
</component>
<component>
<layer>DevRec</layer>
<width>1.45</width>
<offset>0.0</offset>
</component>
</waveguide>

<waveguide>
<name>SiN Strip TE 1550 nm, w=750 nm</name>
<CML>None</CML>
<model>None</model>
<sbends>true</sbends>
<bezier>0.3</bezier>
<radius>50.0</radius>
<width>0.75</width>
<component>
<layer>SiN</layer>
<width>0.75</width>
<offset>0.0</offset>
</component>
<component>
<layer>Waveguide</layer>
<width>0.75</width>
<offset>0.0</offset>
</component>
<component>
<layer>DevRec</layer>
<width>1.95</width>
<offset>0.0</offset>
</component>
</waveguide>

<waveguide>
<name>SiN Strip TE 1550 nm, w=800 nm</name>
<CML>None</CML>
<model>None</model>
<sbends>true</sbends>
<bezier>0.3</bezier>
<radius>50.0</radius>
<width>0.8</width>
<component>
<layer>SiN</layer>
<width>0.8</width>
<offset>0.0</offset>
</component>
<component>
<layer>Waveguide</layer>
<width>0.8</width>
<offset>0.0</offset>
</component>
<component>
<layer>DevRec</layer>
<width>1.95</width>
<offset>0.0</offset>
</component>
</waveguide>

<waveguide>
<name>SiN Strip TE 1550 nm, w=1000 nm</name>
<CML>None</CML>
<model>None</model>
<sbends>true</sbends>
<radius>120</radius>
<width>1.0</width>
<component>
<layer>SiN</layer>
<width>1.0</width>
<offset>0.0</offset>
</component>
<component>
<layer>Waveguide</layer>
<width>1.0</width>
<offset>0.0</offset>
</component>
<component>
<layer>DevRec</layer>
<width>2.0</width>
<offset>0.0</offset>
</component>
</waveguide>

<waveguide>
<name>SiN Strip TM 1550 nm, w=1000 nm</name>
<CML>None</CML>
<model>None</model>
<sbends>true</sbends>
<radius>180</radius>
<width>1.0</width>
<component>
<layer>SiN</layer>
<width>1.0</width>
<offset>0.0</offset>
</component>
<component>
<layer>Waveguide</layer>
<width>1.0</width>
<offset>0.0</offset>
</component>
<component>
<layer>DevRec</layer>
<width>2.0</width>
<offset>0.0</offset>
</component>
</waveguide>

<waveguide>
<name>SiN Strip TE 1310 nm, w=750 nm</name>
<CML>None</CML>
<model>None</model>
<sbends>true</sbends>
<radius>110</radius>
<width>0.75</width>
<component>
<layer>SiN</layer>
<width>0.75</width>
<offset>0.0</offset>
</component>
<component>
<layer>Waveguide</layer>
<width>0.75</width>
<offset>0.0</offset>
</component>
<component>
<layer>DevRec</layer>
<width>2.0</width>
<offset>0.0</offset>
</component>
</waveguide>

<waveguide>
<name>SiN Strip TM 1310 nm, w=750 nm</name>
<CML>None</CML>
<model>None</model>
<sbends>true</sbends>
<radius>150</radius>
<width>0.75</width>
<component>
<layer>SiN</layer>
<width>0.75</width>
<offset>0.0</offset>
</component>
<component>
<layer>Waveguide</layer>
<width>0.75</width>
<offset>0.0</offset>
</component>
<component>
<layer>DevRec</layer>
<width>2.0</width>
<offset>0.0</offset>
</component>
</waveguide>

</waveguides>

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