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ViennaPS-3.1.0
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@tobre1 tobre1 released this 08 Aug 13:27
· 6 commits to master since this release
v3.1.0
23e27e2

What's Changed

  • Update Core, enable automatic publishing of Python packages
  • Add 2-particle TEOS PE-CVD model
  • Enable material-specific rates in SingleParticleProcess
  • Add Bosch process example and SF6 etching model

Full Changelog: v3.0.1...v3.1.0

Assets 2
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