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Extended the oxide regrowth model to 3D #48

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merged 45 commits into from
Nov 6, 2023
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@tobre1 tobre1 commented Oct 31, 2023

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tobre1 and others added 30 commits October 3, 2022 10:01
* Added SF6O2 model

* Added fin geometry

* Added trench geometry

* Trench and hole geometry

* Added deposition model

* Added hole etching example

* Update example process

* Change to reflective boundary

* Update readme#

* Added cell set example

* Update example process
@tobre1 tobre1 merged commit f025ad4 into master Nov 6, 2023
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@tobre1 tobre1 deleted the cell_set_developement branch November 6, 2023 10:32
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