diff --git a/cmake/onnxruntime_providers_webgpu.cmake b/cmake/onnxruntime_providers_webgpu.cmake
index 453faf575bd2d..e527d538d8757 100644
--- a/cmake/onnxruntime_providers_webgpu.cmake
+++ b/cmake/onnxruntime_providers_webgpu.cmake
@@ -23,19 +23,18 @@
   onnxruntime_add_include_to_target(onnxruntime_providers_webgpu
     onnxruntime_common dawn::dawncpp_headers dawn::dawn_headers onnx onnx_proto flatbuffers::flatbuffers Boost::mp11 safeint_interface)
 
+  set(onnxruntime_providers_webgpu_dll_deps)
+
   if (onnxruntime_BUILD_DAWN_MONOLITHIC_LIBRARY)
     target_link_libraries(onnxruntime_providers_webgpu dawn::webgpu_dawn)
 
-    if (onnxruntime_ENABLE_DELAY_LOADING_WIN_DLLS)
-      list(APPEND onnxruntime_DELAYLOAD_FLAGS "/DELAYLOAD:webgpu_dawn.dll")
-    endif()
+    if (WIN32)
+      if (onnxruntime_ENABLE_DELAY_LOADING_WIN_DLLS)
+        list(APPEND onnxruntime_DELAYLOAD_FLAGS "/DELAYLOAD:webgpu_dawn.dll")
+      endif()
 
-    # Copy webgpu_dawn.dll to the output directory
-    add_custom_command(
-      TARGET onnxruntime_providers_webgpu
-      POST_BUILD
-      COMMAND ${CMAKE_COMMAND} -E copy_if_different "$<TARGET_FILE:dawn::webgpu_dawn>" "$<TARGET_FILE_DIR:onnxruntime_providers_webgpu>"
-      VERBATIM )
+      list(APPEND onnxruntime_providers_webgpu_dll_deps "$<TARGET_FILE:dawn::webgpu_dawn>")
+    endif()
   else()
     if (NOT onnxruntime_USE_EXTERNAL_DAWN)
       target_link_libraries(onnxruntime_providers_webgpu dawn::dawn_native)
@@ -48,12 +47,17 @@
     add_dependencies(onnxruntime_providers_webgpu copy_dxil_dll)
     add_dependencies(onnxruntime_providers_webgpu dxcompiler)
 
-    # Copy dxil.dll and dxcompiler.dll to the output directory
+    list(APPEND onnxruntime_providers_webgpu_dll_deps "$<TARGET_FILE_DIR:dxcompiler>/dxil.dll")
+    list(APPEND onnxruntime_providers_webgpu_dll_deps "$<TARGET_FILE_DIR:dxcompiler>/dxcompiler.dll")
+  endif()
+
+  if (onnxruntime_providers_webgpu_dll_deps)
+    # Copy dependency DLLs to the output directory
     add_custom_command(
       TARGET onnxruntime_providers_webgpu
       POST_BUILD
-      COMMAND ${CMAKE_COMMAND} -E copy_if_different "$<TARGET_FILE_DIR:dxcompiler>/dxil.dll" "$<TARGET_FILE_DIR:onnxruntime_providers_webgpu>"
-      COMMAND ${CMAKE_COMMAND} -E copy_if_different "$<TARGET_FILE_DIR:dxcompiler>/dxcompiler.dll" "$<TARGET_FILE_DIR:onnxruntime_providers_webgpu>"
+      COMMAND ${CMAKE_COMMAND} -E copy_if_different "${onnxruntime_providers_webgpu_dll_deps}" "$<TARGET_FILE_DIR:onnxruntime_providers_webgpu>"
+      COMMAND_EXPAND_LISTS
       VERBATIM )
   endif()